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Assume that a 100-mm diameter GaAs wafer is uniformly implanted with 100-keV zinc ions for 5 minutes with a constant ion beam current of 10 μA. What are the ion dose per unit area and the peak ion concentration? | Numerade
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numerade.com
Assume that a 100  mm diameter GaAs wafer is uniformly implanted with 100 keV zinc ions for 5 minutes with a constant ion beam current of 10 μA. What are the ion dose per unit area and the peak ion concentration? | Numerade
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numerade.com
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