HMI, formerly known as Hermes Microvision Inc., is an integral part of ASML as a leader in e-beam inspection equipment for the semiconductor industry.

The HMI eP5 is ASML's highest-resolution e-beam system, offering CD metrology and defect detection for chip development and production monitoring.

Nov 22, 2016 · ASML Holding NV (ASML) and Hermes Microvision, Inc. (HMI) announce today that they have completed the previously announced transaction pursuant to which ASML has acquired all outstanding shares of HMI.

Apr 28, 2022 · ASML has announced the first customer installation of its HMI eScan 1100, the first multiple e-beam (multibeam) wafer inspection system for in-line yield enhancement applications, including voltage contrast defect inspection and physical defect inspection.

Jun 16, 2016 · ASML Holding NV intents to acquire Taiwanese company Hermes Microvision, Inc (HMI), a leading supplier of pattern verification systems used for advanced semiconductor devices.

Apr 25, 2022 · Armed with 25 beams in a 5 by 5 configuration, the eScan 1100 is able to increase throughput up 15 times compared to single-beam systems, enabling defect monitoring in high-volume manufacturing environments, ASML subsidiary HMI claims.

The HMI eScan 1100 utilizes cutting-edge multiple e-beam (multibeam) technology to inspect microchip wafers and detect defects, with up to 15 times faster throughput than single e-beam inspection tools for targeted in-line defect inspection applications.

Jun 17, 2016 · HMI e-beam metrology will deliver accurate patterning information, which ASML can use to optimize its powerful design and process models, a cornerstone of ASML’s successful computational lithography business.

Apr 27, 2022 · ASML has made the first customer installation of its HMI eScan 1100, the first multiple e-beam (multibeam) wafer inspection system for in-line yield enhancement applications, including voltage contrast defect inspection and physical defect inspection.

San Jose, California, May 28, 2020 – ASML Holding NV (ASML) today announced that it has completed system integration and testing of its first-generation HMI multibeam inspection (MBI) system...