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Cyclic Time
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Cyclic
Model
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Time
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Cyclical vs
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Cyclical Time
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researchgate.net
Film thickness removed during etch versus etch t…
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researchgate.net
Etch results of the gradual thinning. a Etch duration ve…
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researchgate.net
Etch rate of thickness reduction versus etchin…
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researchgate.net
Etch depth of Si and thickness of silicon oxide on Si as a function of ...
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researchgate.net
Selectivity of SiN etch to Si and SiO2, vertical/lat…
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researchgate.net
Normalized etch rates and etch selectivities of Si and TiO2 li…
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researchgate.net
Effect of etch temperature on etch per cycle for the binary process ...
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researchgate.net
Comparison of the closed-loop etch and open-loop (timed) etch of -Si ...
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ResearchGate
Enhanced etch selectivity of SiCN versus SiN for a dual inlaid via etch ...
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ResearchGate
Enhanced etch selectivity of SiCN versus SiN for a dual inl…
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researchgate.net
Schematic diagram of two-step sequential cyclic etching. | Do…
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researchgate.net
Calculated throughput for a Si:C CDE process as function of etch time ...
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researchgate.net
Thickness as a function of the etch time for unannealed (a) and ...
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researchgate.net
Etch per cycle for TiN, SiO 2 , Al 2 O 3 and Si 3 N 4 is plot…
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researchgate.net
(a) Schematic of Etch Process on SiCOH Film Stack (b) SEM Cross-Section ...
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researchgate.net
Effect of temperature on the etch rate of 6H-SiC …
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researchgate.net
Separate contributions t…
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researchgate.net
Etch rates of a-SiC and a-SiC x N y as a function of N 2 /Ar rati…
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researchgate.net
(PDF) Additional Siconi™ pre-clean fo…
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researchgate.net
SEM images of the copper film…
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semanticscholar.org
Figure 1 from Trench Etch for SiC Power Devices | Semantic Scholar
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researchgate.net
Effect of stirring on the c-Si wet-etch anisotropy. (A) Schematic ...
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ResearchGate
Effect of temperature on the etch rate of 6H-SiC in (22.…
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researchgate.net
A change in the thickness values with total number of etch cycle…
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researchgate.net
Bulk silicon etch depth versus pulse duration for three puls…
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ResearchGate
Etch rates of Si and SiC in CF 4 or CHF 3 plasma as a fun…
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ResearchGate
Etch rates of Si and SiC in CF 4 or CHF 3 plasma as a fun…
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ResearchGate
Etch rate for post-annealed SiC films as a function of O …
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researchgate.net
Etch rate of Si{100} as a function of etching temperature in 25 wt ...
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semanticscholar.org
Figure 9 from Etching mechanism of the single-step through-silicon-via ...
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semanticscholar.org
Figure 1 from Etching mecha…
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researchgate.net
Etched thickness (left axis) and corresponding etch per cycle …
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researchgate.net
Etch rate dependence on CF 3 I flow rate for silico…
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researchgate.net
Etch rate dependence on CF 3 I flow rate for silicon oxid…
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ResearchGate
(Color online) (a) Etch rates and s…
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