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samcointl.com
ICP Etch Systems | Samco Inc.
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samcointl.com
ICP Etch Systems | Samco Inc.
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researchgate.net
Etch rate vs gas flow rate ICP coil power500 W; bia…
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researchgate.net
Etch rate vs gas flow rate ICP coil power500 W; bias voltage 150 V ...
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Etch rate vs gas flow rate ICP coil power500 W; bia…
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Etch rate vs gas flow rate ICP coil power500 W; b…
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ResearchGate
ICP etch rate variation with elapsed etch time. (Coil/Platen Power=950 ...
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ResearchGate
Etch rate vs ICP coil power for different dc bias voltages. (Pre…
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ResearchGate
Etch rate vs ICP coil power for different dc bi…
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Etch rate vs ICP coil power for different dc bi…
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ResearchGate
Etch rate vs ICP coil power for different dc bi…
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researchgate.net
Etch rate vs gas mixture composition ͑ ICP coil p…
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ResearchGate
Etch rate versus ICP coil power. | Download Sci…
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ResearchGate
Etch rate versus ICP coil power. | Download Scientifi…
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ResearchGate
Etch rate vs ICP coil power for …
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ResearchGate
͑ a ͒ Etch rate vs. gas ratio for HCl/SF 6 gas mixtur…
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researchgate.net
Influence of ICP-power on the etch rate and …
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researchgate.net
Influence of ICP-power on the etch rate and …
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researchgate.net
Effects of bias to ICP power ratio on etch rate, 40% SF 6 t…
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researchgate.net
Etch rates and dc self bias values as a function of IC…
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researchgate.net
SCD etch rates versus ICP Coil/Platen power of selected ICP-RIE ...
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Etch rates and dc self bias values as a functi…
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Etch rates and dc self bias values as a function of ICP p…
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ResearchGate
GaN etch rate and DC bias voltage as a function of ICP power. The RF ...
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ResearchGate
GaN etch rate and DC bias voltage as a functi…
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researchgate.net
Etch rates of the quartz as a function of the bias power. ICP …
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researchgate.net
ICP etched via profile at 40mTorr. (Coil Power=950W, …
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corial.plasmatherm.com
Corial 200I ICP-RIE etch system | Corial
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mks.com
Etch Overview
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ResearchGate
Al 2 O 3 etch rates as a function of rf peak bias in the ICP ...
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ResearchGate
Al 2 O 3 etch rates as a function of rf peak bias in th…
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Etch rate as a function of bias power (via diameter: 30 μm…
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ResearchGate
Schematic outline of the planar coil ICP. | Download …
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wiki.nanofab.ucsb.edu
ICP Etching Recipes - UCSB Nanofab Wiki
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researchgate.net
After the directional ICP …
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