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Thickness (Å) versus cycles of an ALD process using TEMAH and water at ...
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Thickness (Å) versus cycles of an ALD proc…
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Thickness (Å) versus ozone dose of ALD TEMAH HfO 2 growth at 280 o C ...
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Molecular strucutre of TEMAH, the used ALD precursor for HfO2 ...
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Molecular strucutre of TEMAH, the used AL…
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Mechanisim of thermal-ALD reaction for TEMAH precursor. In this ...
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ALD process development ALD process: saturation cur…
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