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researchgate.net
Effect of surface morphology of poly-silicon on hard mask etch ...
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11: Silicon-photoresist etch selectivity and silicon etc…
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Effect of surface morphology of poly-silicon on hard mask etch ...
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Photosensitive etch mask for creating through-silicon vias (TSVs)
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Mask undercut in deep silicon etch | Applied Physics Letters | AIP ...
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What is the root cause for poly hard mask damage of dielectric etch at ...
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chegg.com
Solved A patterned photoresist is used as a mask to etch | Chegg.com
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Etching mask (PR) The figure on the right shows a | Chegg.com
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Etch rates of the hybrid polymer, S1813 positive photoresist and plasma ...
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ResearchGate
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Spray Coating Photoresist On Silicon Wafers - Photoresist Coater
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