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Figure S1. The SEM image for ALD SnO 2 …
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AFM taping-mode height (3D) images (5 × 5 µm²) of the 120-nm-thick ...
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a) Film thickness versus ALD cycle number mo…
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Characterization of the surface property of the ALD …
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ALD of atomically intermixed SnO2-TiO2, SnO2-Fe2O3 and SnO2-ZnO ...
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Energy band structure of the ALD SnO 2 films according to postannealing ...
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Highly Sensitive ALD SnO2 Sensors and the Role of its Thickness in Gas Sensing Capabilities
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