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ALD
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Plasma ALD of SiO2: film conformality and influence of ions – Atomic Limits
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Plasma ALD of SiO2: influence of ion energy dose – Atomic Limits
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Electrical properties of the ALD-TiO 2 /ALD-Al 2 O …
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Operation and structure of an ALD SiNx -SiO2 …
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a) Schematic of the first TiO2 ALD layer formed on the SnS2 …
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ALD recipes for Al 2 O 3 , HfO 2 and SiO 2 | Downl…
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-(a,b) SEM images of a 500 cycle layer of ALD TiO2 gro…
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Figure 1 from ALD-SiO2 deposition and CD slimming techniques for double ...
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(Color online) A schematic showing the thicknesses …
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(a) ALD sequence diagrams of ZrO 2 and SiO 2 . (b) Schematic structure ...
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(a) A sketch of the area-selective ALD on metal/ SiO …
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(a) Thickness of the RP-ALD SiO2 thin films at var…
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(a) Development of the Si loading with t…
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SEM images of ALD grown SiO 2 films with various thicknesses (1…
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a) Schematic illustration of AS‐ALD SiO2 thin films on 2D... | Download ...
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a) Schematic illustration of AS‐ALD SiO2 thin films o…
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Schematic ALD cycle at steady state for SiO 2 from pulses of the ...
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