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Low temperature nitride film deposition
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Left: The schematic of the fabrication process: (a) poly-Si deposition ...
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Polysilicon grain size versus deposition temperature. Adapted from [7 ...
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6: Polysilicon rods after deposition processes conducted in the ...
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Fabrication of the silicon chips. Polysilicon microchips (SiµC…
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Two-mask fabrication process of polysilicon cantilevers. | Download ...
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